Patent Assignment
Reel/Frame 041602/0468
Assignment of Assignor's Interest
Recorded: 2017-03-16
Pages: 6
Assignors
QIAN, JUN
Executed: 2017-03-14
KUMAR, PURUSHOTTAM
Executed: 2017-03-14
LAVOIE, ADRIEN
Executed: 2017-03-14
ZHAI, YOU
Executed: 2017-03-14
BALDWIN, JEREMIAH
Executed: 2017-03-15
KIM, SUNG JE
Executed: 2017-03-14
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Systems and Methods for Flow Monitoring in a Precursor Vapor Supply System of a Substrate Processing System