Patent Assignment
Reel/Frame 041615/0977
Assignment of Assignor's Interest
Recorded: 2017-03-17
Pages: 5
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, AKASAKA BIZ TOWER, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Defectivity Metrology During Dsa Patterning