Patent Assignment
Reel/Frame 041643/0513
Assignment of Assignor's Interest
Recorded: 2017-03-20
Pages: 8
Assignors
HARADA, KATSUYOSHI
Executed: 2017-03-02
TAKASAWA, YUSHIN
Executed: 2017-03-06
SHIMAMOTO, SATOSHI
Executed: 2017-03-02
HATTA, HIROKI
Executed: 2017-03-02
Assignee
HITACHI KOKUSAI ELECTRIC INC.
15-12, NISHI-SHIMBASHI 2-CHOME, MINATO-KU, TOKYO, 105-8039, JAPAN
Covered Property
(1)
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.