Patent Assignment
Reel/Frame 041645/0296
Assignment of Assignor's Interest
Recorded: 2017-02-07
Pages: 7
Assignors
BUDACH, MICHAEL
Executed: 2016-11-22
SCHNELL, MICHAEL
Executed: 2016-11-25
SCHINDLER, BERND
Executed: 2016-11-25
BOESE, MARKUS
Executed: 2017-01-25
Assignee
CARL ZEISS SMT GMBH
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Methods and Devices for Examining an Electrically Charged Specimen Surface