Patent Assignment
Reel/Frame 041667/0143
Assignment of Assignor's Interest
Recorded: 2017-03-21
Pages: 8
Assignors
YOSHIDA, HIDENARI
Executed: 2017-03-06
ODAKE, SHIGERU
Executed: 2017-03-06
TANIYAMA, TOMOSHI
Executed: 2017-03-06
NAKADA, TAKAYUKI
Executed: 2017-03-06
Assignee
HITACHI KOKUSAI ELECTRIC INC.
15-12, NISHI-SHIMBASHI 2-CHOME, MINATO-KU, TOKYO, 105-8039, JAPAN
Covered Property
(1)
Substrate Processing Device, Manufacturing Method for Semiconductor Device, and Reaction Tube
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.