Patent Assignment
Reel/Frame 041667/0223
Assignment of Assignor's Interest
Recorded: 2017-03-21
Pages: 3
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Method for Acquiring Data Indicating Electrostatic Capacitance