Patent Assignment
Reel/Frame 041667/0226
Assignment of Assignor's Interest
Recorded: 2017-03-21
Pages: 8
Assignors
EMOTO, TETSUYA
Executed: 2016-12-22
EITOKU, ATSURO
Executed: 2016-12-26
IWATA, TOMOMI
Executed: 2016-12-14
Assignee
SCREEN HOLDINGS CO., LTD.
TENJINKITA-MACHI 1-1, TERANOUCHI-AGARU 4-CHOME, HORIKAWA-DORI, KAMIGYO-KU, KYOTO-SHI, KYOTO, 602-8585, JAPAN
Covered Property
(1)
Substrate Processing Apparatus and Substrate Processing Method