Patent Assignment
Reel/Frame 041681/0363
Assignment of Assignor's Interest
Recorded: 2017-03-22
Pages: 5
Assignors
TROMP, SIEGFRIED ALEXANDER
Executed: 2014-11-25
VERWEIJ, ANTONIE HENDRIK
Executed: 2014-11-24
SOETHOUDT, ABRAHAM ALEXANDER
Executed: 2014-11-24
VAN DE POEL, JAN PIETER
Executed: 2014-11-28
BAGGEN, MARK CONSTANT JOHANNES
Executed: 2014-11-24
Assignee
ASML NETHERLANDS B.V.
DE RUN 6501, VELDHOVEN, NL-5504 DR, NETHERLANDS
Covered Property
(1)
Support Table for a Lithographic Apparatus, Method of Loading a Substrate, Lithographic Apparatus and Device Manufacturing Method