Patent Assignment
Reel/Frame 041687/0090
Assignment of Assignor's Interest
Recorded: 2017-03-22
Pages: 5
Assignors
BI, ZHENXING
Executed: 2016-09-21
CANAPERI, DONALD F.
Executed: 2016-09-21
DEVARAJAN, THAMARAI S.
Executed: 2016-09-20
LOUBET, NICOLAS J.
Executed: 2016-09-27
Assignee
INTERNATIONAL BUSINESS MACHINES CORPORATION
NEW ORCHARD ROAD, ARMONK, NEW YORK, 10504
Covered Property
(1)
Polysilicon Residue Removal in Nanosheet Mosfets