Patent Assignment
Reel/Frame 041707/0886
Assignment of Assignor's Interest
Recorded: 2017-03-23
Pages: 4
Assignors
BRINK, MARKUS
Executed: 2015-06-11
GUILLORN, MICHAEL A.
Executed: 2015-06-11
LIN, CHUNG-HSUN
Executed: 2015-06-11
TSAI, HSINYU
Executed: 2015-06-11
Assignee
INTERNATIONAL BUSINESS MACHINES CORPORATION
NEW ORCHARD ROAD, ARMONK, NEW YORK, 10504
Covered Property
(1)
Chemoepitaxy Etch Trim Using a Self Aligned Hard Mask for Metal Line to Via