Patent Assignment
Reel/Frame 041730/0274
Assignment of Assignor's Interest
Recorded: 2017-03-24
Pages: 4
Assignors
CHAO, ROBIN H.
Executed: 2017-03-23
LEE, CHOONGHYUN
Executed: 2017-03-23
YEUNG, CHUN W.
Executed: 2017-03-23
ZHANG, JINGYUN
Executed: 2017-03-23
Assignee
INTERNATIONAL BUSINESS MACHINES CORPORATION
NEW ORCHARD ROAD, ARMONK, NEW YORK, 10504
Covered Property
(1)
Uniform Low-K Inner Spacer Module in Gate-All-Around (Gaa) Transistors