Patent Assignment
Reel/Frame 041752/0836
Assignment of Assignor's Interest
Recorded: 2017-03-27
Pages: 3
Assignee
ASML NETHERLANDS B.V.
P.O. BOX 324, VELDHOVEN, 5500 AH, NETHERLANDS
Covered Property
(1)
Metrology Methods, Metrology Apparatus and Device Manufacturing Method