Patent Assignment
Reel/Frame 041759/0007
Assignment of Assignor's Interest
Recorded: 2017-03-28
Pages: 9
Assignors
RUOFF, JOHANNES
Executed: 2017-02-23
MÜLLER, RALF
Executed: 2017-03-23
BEDER, SUSANNE
Executed: 2017-02-14
MATEJKA, ULRICH
Executed: 2017-02-13
MANN, HANS-JÜRGEN
Executed: 2017-03-23
NEUMANN, JENS TIMO
Executed: 2017-02-16
Assignee
CARL ZEISS SMT GMBH
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Imaging Optical Unit for a Metrology System for Examining a Lithography Mask