Patent Assignment
Reel/Frame 041766/0479
Assignment of Assignor's Interest
Recorded: 2017-03-28
Pages: 4
Assignors
OKUTANI, MANABU
Executed: 2017-03-21
OTA, TAKASHI
Executed: 2017-03-21
ABE, HIROSHI
Executed: 2017-03-21
YOSHIHARA, NAOHIKO
Executed: 2017-03-21
Assignee
SCREEN HOLDINGS CO., LTD.
TENJINKITA-MACHI 1-1, TERANOUCHI-AGARU 4-CHOME, HORIKAWA-DORI, KAMIGYO-KU, KYOTO-SHI, KYOTO, 602-8585, JAPAN
Covered Property
(1)
Substrate Processing Method and Substrate Processing Apparatus