Patent Assignment
Reel/Frame 041785/0155
Assignment of Assignor's Interest
Recorded: 2017-03-29
Pages: 7
Assignors
ASAI, KAZUHIDE
Executed: 2017-03-15
YAMAMOTO, KAZUYOSHI
Executed: 2017-03-15
KAWAGISHI, TAKAYUKI
Executed: 2017-03-15
HAYASHIHARA, HIDEMOTO
Executed: 2017-03-15
YASHIKI, KAYOKO
Executed: 2017-03-15
IWAKURA, HIROYUKI
Executed: 2017-03-15
Assignee
HITACHI KOKUSAI ELECTRIC INC.
15-12, NISHI-SHIMBASHI 2-CHOME, MINATO-KU, TOKYO, 105-8039, JAPAN
Covered Property
(1)
Substrate Processing in a Process Chamber for Semiconductor Manufacturing and Apparatus Management Controller with Error Analysis
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.