Patent Assignment
Reel/Frame 041785/0956
Assignment of Assignor's Interest
Recorded: 2017-03-29
Pages: 6
Assignors
SALIMIAN, SIAMAK
Executed: 2017-03-28
GAO, QI
Executed: 2017-03-28
MAYNARD, HELEN L.
Executed: 2017-03-28
Assignee
VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC.
35 DORY ROAD, GLOUCESTER, MASSACHUSETTS, 01930
Covered Property
(1)
Plasma Doping Using A Solid Dopant Source