Patent Assignment
Reel/Frame 041790/0033
Assignment of Assignor's Interest
Recorded: 2017-03-29
Pages: 5
Assignor
KATO, HITOSHI
Executed: 2017-03-21
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Plasma Processing Apparatus and Plasma Processing Method