Patent Assignment
Reel/Frame 041811/0658
Assignment of Assignor's Interest
Recorded: 2017-03-31
Pages: 3
Assignors
SLOTBOOM, DAAN MAURITS
Executed: 2016-03-24
DEN BOEF, ARIE JEFFREY
Executed: 2016-03-25
EBERT, MARTIN
Executed: 2016-03-24
Assignee
ASML NETHERLANDS B.V.
P.O. BOX 324, VELDHOVEN, 5500 AH, NETHERLANDS
Covered Property
(1)
Metrology Method, Target and Substrate