Patent Assignment
Reel/Frame 041817/0680
Assignment of Assignor's Interest
Recorded: 2017-03-31
Pages: 7
Assignors
CHEN, LIU-LIAN
Executed: 2017-03-08
DU, XIAN-FENG
Executed: 2017-03-08
ZHANG, GUO-HAI
Executed: 2017-03-08
Assignee
UNITED MICROELECTRONICS CORP.
NO. 3, LI-HSIN RD. II, SCIENCE-BASED INDUSTRIAL PARK, HSINCHU, TAIWAN
Covered Property
(1)
Method for Determining Abnormal Equipment in Semiconductor Manufacturing System and Program Product