Patent Assignment
Reel/Frame 041836/0736
Assignment of Assignor's Interest
Recorded: 2017-02-28
Pages: 6
Assignors
BAE, SUKJONG
Executed: 2016-12-20
LEE, MYOUNGSOO
Executed: 2016-12-21
SHIN, INKYUN
Executed: 2016-12-20
Assignee
SAMSUNG ELECTRONICS CO., LTD.
129, SAMSUNG-RO, YEONGTONG-GU, SUWON-SI, GYEONGGI-DO, 16677, KOREA, REPUBLIC OF
Covered Property
(1)
Charged-Particle Beam Exposure Method and Charged-Particle Beam Correction Method