Patent Assignment
Reel/Frame 041841/0395
Assignment of Assignor's Interest
Recorded: 2017-04-04
Pages: 2
Assignor
SHIBAYAMA, NOBUYUKI
Executed: 2017-03-13
Assignee
SCREEN HOLDINGS CO., LTD.
TENJINKITA-MACHI 1-1, TERANOUCHI-AGARU 4-CHOME, HORIKAWA-DORI, KAMIGYO-KU, KYOTO-SHI, KYOTO, 602-8585, JAPAN
Covered Property
(1)
Substrate Processing Device and Substrate Processing Method for Carrying Out Chemical Treatment for Substrate