Patent Assignment
Reel/Frame 041842/0149
Assignment of Assignor's Interest
Recorded: 2017-04-04
Pages: 7
Assignors
VAN DER SCHAAR, MAURITS
Executed: 2016-04-18
VAN HAREN, RICHARD JOHANNES FRANCISCUS
Executed: 2016-04-15
MOS, EVERHARDUS CORNELIS
Executed: 2016-05-01
ZHANG, YOUPING
Executed: 2016-05-17
Assignee
ASML NETHERLANDS B.V.
P.O. BOX 324, VELDHOVEN, 5500 AH, NETHERLANDS
Covered Property
(1)
Metrology Target, Method and Apparatus, Target Design Method, Computer Program and Lithographic System