Patent Assignment
Reel/Frame 041855/0406
Assignment of Assignor's Interest
Recorded: 2017-04-05
Pages: 3
Assignors
VERMA, ALOK
Executed: 2015-12-10
KHO, SINATRA CANGGIH
Executed: 2015-12-16
VAN LEEST, ADRIAAN JOHAN
Executed: 2015-12-10
Assignee
ASML NETHERLANDS B.V.
P.O. BOX 324, VELDHOVEN, 5500 AH, NETHERLANDS
Covered Property
(1)
Lithography System, Method and Computer Program Product for Hierarchical Representation of Two-Dimensional or Three-Dimensional Shapes