Patent Assignment
Reel/Frame 041891/0298
Assignment of Assignor's Interest
Recorded: 2017-04-06
Pages: 5
Assignors
TAKEYA, KOJI
Executed: 2017-04-06
NISHIMURA, KAZUAKI
Executed: 2017-04-06
TAKAHASHI, NOBUHIRO
Executed: 2017-04-06
MATSUNAGA, JUNICHIRO
Executed: 2017-04-06
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Etching Method