Patent Assignment
Reel/Frame 041940/0900
Assignment of Assignor's Interest
Recorded: 2017-04-10
Pages: 5
Assignor
FUJIWARA, TAKAYUKI
Executed: 2017-03-03
Assignee
SHIN-ETSU CHEMICAL CO., LTD.
6-1, OHTEMACHI 2-CHOME, CHIYODA-KU, TOKYO, JAPAN
Covered Property
(1)
Monomer, Polymer, Resist Composition, and Patterning Process