Patent Assignment
Reel/Frame 041947/0803
Assignment of Assignor's Interest
Recorded: 2017-04-10
Pages: 3
Assignors
ABATCHEV, MIRZAFER
Executed: 2017-04-01
FU, QIAN
Executed: 2017-03-31
ISHIKAWA, YASUSHI
Executed: 2017-04-06
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Post Etch Treatment to Prevent Pattern Collapse
Patent:
9,941,123 →
Application:
15/483,662 →