Patent Assignment
Reel/Frame 042002/0470
Assignment of Assignor's Interest
Recorded: 2017-04-13
Pages: 3
Assignor
OHATA, MITSUNORI
Executed: 2017-03-15
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Method for Etching Multilayer Film