Patent Assignment
Reel/Frame 042009/0796
Assignment of Assignor's Interest
Recorded: 2017-04-14
Pages: 7
Assignors
VAN DER SCHAAR, MAURITS
Executed: 2016-03-04
SMILDE, HENDRIK JAN HIDDE
Executed: 2016-03-04
TSIATMAS, ANAGNOSTIS
Executed: 2016-03-03
VAN LEEST, ADRIAAN JOHAN
Executed: 2016-03-03
VERMA, ALOK
Executed: 2016-03-03
THEEUWES, THOMAS
Executed: 2016-03-04
CRAMER, HUGO AUGUSTINUS JOSEPH
Executed: 2016-03-03
HINNEN, PAUL CHRISTIAAN
Executed: 2016-03-03
ZHANG, YOUPING
Executed: 2016-03-03
Assignee
ASML NETHERLANDS B.V.
P.O. BOX 324, VELDHOVEN, 5500 AH, NETHERLANDS
Covered Property
(1)
Method And Apparatus for Measuring a Parameter of a Lithographic Process, Substrate and Patterning Devices for use in the Method