Patent Assignment
Reel/Frame 042028/0990
Assignment of Assignor's Interest
Recorded: 2017-04-17
Pages: 5
Assignee
SHIN-ETSU CHEMICAL CO., LTD.
6-1, OHTEMACHI 2-CHOME, CHIYODA-KU, TOKYO, JAPAN
Covered Property
(1)
Novel Carboxylic Acid Onium Salt, Chemically Amplified Resist Composition, and Pattern Forming Process