Patent Assignment
Reel/Frame 042068/0579
Assignment of Assignor's Interest
Recorded: 2017-04-19
Pages: 3
Assignee
ASM IP HOLDING B.V.
VERSTERKERSTRAAT 8, ALMERE, 1322 AP, NETHERLANDS
Covered Property
(1)
Method for Forming Carbon-Containing Silicon/Metal Oxide or Nitride Film by Ald Using Silicon Precursor and Hydrocarbon Precursor