Patent Assignment
Reel/Frame 042082/0962
Assignment of Assignor's Interest
Recorded: 2017-04-20
Pages: 4
Assignor
SHIBAZAKI, YUICHI
Executed: 2017-04-18
Assignee
NIKON CORPORATION
15-3, KONAN 2-CHOME, MINATO-KU, TOKYO, 108-6290, JAPAN
Covered Property
(1)
Substrate Holding Device, Exposure Apparatus, and Device Manufacturing Method