Patent Assignment
Reel/Frame 042089/0473
Assignment of Assignor's Interest
Recorded: 2017-04-21
Pages: 3
Assignors
WANG, TSAN-CHUN
Executed: 2015-11-13
YU, DE-WEI
Executed: 2015-11-13
FANG, ZIWEI
Executed: 2015-11-13
CHEN, YI-FAN
Executed: 2015-11-13
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD
NO. 8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300-77, TAIWAN
Covered Property
(1)
Interlayer Dielectric Film in Semiconductor Devices