Patent Assignment
Reel/Frame 042124/0679
Assignment of Assignor's Interest
Recorded: 2017-04-24
Pages: 5
Assignor
YAMAZAWA, YOHEI
Executed: 2017-03-27
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Transformer, Plasma Processing Apparatus, and Plasma Processing Method