Patent Assignment
Reel/Frame 042132/0719
Assignment of Assignor's Interest
Recorded: 2017-04-24
Pages: 5
Assignee
UNITED MICROELECTRONICS CORP.
NO.3, LI-HSIN ROAD 2, SCIENCE-BASED INDUSTRIAL PARK, HSIN-CHU CITY, TAIWAN
Covered Property
(1)
Overlay Mark and Method for Evaluating Stability of Semiconductor Manufacturing Process