Patent Assignment
Reel/Frame 042150/0065
Assignment of Assignor's Interest
Recorded: 2017-04-26
Pages: 5
Assignors
IWAI, KAZUTOSHI
Executed: 2017-03-21
MIZUTANI, NOBUTAKA
Executed: 2017-03-28
INATOMI, YUICHIRO
Executed: 2017-03-31
TANAKA, TAKASHI
Executed: 2017-04-17
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Plating Apparatus, Plating Method, and Recording Medium