Patent Assignment
Reel/Frame 042160/0846
Assignment of Assignor's Interest
Recorded: 2017-04-27
Pages: 3
Assignor
LIN, TA-WEI
Executed: 2017-04-14
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO. 8, LI-HSIN RD. 6, SCIENCE-BASED INDUSTRIAL PARK, HSINCHU, 300, TAIWAN
Covered Property
(1)
Reduction of Dishing During Chemical Mechanical Polish of Gate Structure