Patent Assignment
Reel/Frame 042169/0416
Assignment of Assignor's Interest
Recorded: 2017-04-27
Pages: 6
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO, 101-8980, JAPAN
Covered Property
(1)
Substrate Processing Apparatus
Application:
15/499,559 →
Publication:
US 2017/0271176
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.