Patent Assignment
Reel/Frame 042187/0562
Assignment of Assignor's Interest
Recorded: 2017-04-28
Pages: 5
Assignors
PARK, CHANG-MIN
Executed: 2016-12-27
HWANG, MYUNG-SOO
Executed: 2016-12-27
LEE, JI-SUN
Executed: 2016-12-27
Assignee
SAMSUNG ELECTRONICS CO., LTD
129, SAMSUNG-RO, YEONGTONG-GU, SUWON-SI, GYEONGGI-DO, 16677, KOREA, REPUBLIC OF
Covered Property
(1)
Extreme Ultraviolet (Euv) Exposure System and Method of Manufacturing Semiconductor Device Using the Same