Patent Assignment
Reel/Frame 042211/0921
Assignment of Assignor's Interest
Recorded: 2017-05-02
Pages: 5
Assignors
PARK, SOONAM
Executed: 2014-10-29
ZHU, YUFEI
Executed: 2014-11-18
SUAREZ, EDWIN C.
Executed: 2014-11-04
INGLE, NITIN K.
Executed: 2014-10-30
LUBOMIRSKY, DMITRY
Executed: 2014-10-31
HUANG, JIAYIN
Executed: 2014-10-30
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Systems and Methods for Internal Surface Conditioning in Plasma Processing Equipment