Patent Assignment
Reel/Frame 042229/0100
Assignment of Assignor's Interest
Recorded: 2017-05-03
Pages: 7
Assignors
KUBO, AKIHIRO
Executed: 2014-10-21
FUKUDA, MASAHIRO
Executed: 2014-10-21
YAMAMOTO, TARO
Executed: 2014-10-21
YADA, KENJI
Executed: 2014-10-21
ENOMOTO, MASASHI
Executed: 2014-10-22
NAKASHIMA, NOBORU
Executed: 2014-10-21
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Polishing Cleaning Mechanism, Substrate Processing Apparatus, and Substrate Processing Method