Patent Assignment
Reel/Frame 042240/0296
Assignment of Assignor's Interest
Recorded: 2017-05-04
Pages: 5
Assignee
SHIN-ETSU CHEMICAL CO., LTD.
6-1, OHTEMACHI 2-CHOME, CHIYODA-KU, TOKYO, JAPAN
Covered Property
(1)
Polymer, Positive Resist Composition, and Pattern Forming Process