Patent Assignment
Reel/Frame 042275/0125
Assignment of Assignor's Interest
Recorded: 2017-05-08
Pages: 3
Assignors
NAGORNY, VLADIMIR
Executed: 2011-12-07
LEE, DONGSOO
Executed: 2011-12-07
KADAVANICH, ANDREAS
Executed: 2011-12-08
Assignee
MATTSON TECHNOLOGY, INC.
47131 BAYSIDE PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Inductively Coupled Plasma Source for Plasma Processing
Application:
15/589,127 →
Publication:
US 2017/0243721
Related Assignments
(3)
Other recorded transfers of the patent in this record — the chain of ownership.
Security Interest
Aug 27, 2018
From: MATTSON TECHNOLOGY, INC.
To: EAST WEST BANK
Reel/Frame 046956/0348 →
Assignment of Assignor's Interest
Sep 30, 2019
From: MATTSON TECHNOLOGY, INC.
To: MATTSON TECHNOLOGY, INC.; BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY, CO., LTD
Reel/Frame 050582/0796 →
Release of Security Interest
Apr 15, 2021
From: EAST WEST BANK
To: MATTSON TECHNOLOGY, INC.
Reel/Frame 055950/0452 →