Patent Assignment
Reel/Frame 042285/0912
Assignment of Assignor's Interest
Recorded: 2017-05-09
Pages: 2
Assignee
L'AIR LIQUIDE, SOCIÉTÉ ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCÉDÉS GEORGES CLAUDE
75 QUAI D'ORSAY, PARIS, F-75007, FRANCE
Covered Property
(1)
Methods for Minimizing Sidewall Damage During Low K Etch Processes
Application:
15/396,486 →
Publication:
US 2017/0110336
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.