Patent Assignment
Reel/Frame 042319/0540
Assignment of Assignor's Interest
Recorded: 2017-05-10
Pages: 3
Assignor
KUBOTA, SHINJI
Executed: 2017-05-09
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Plasma Processing Apparatus and Plasma Processing Method