Patent Assignment
Reel/Frame 042322/0143
Assignment of Assignor's Interest
Recorded: 2017-05-10
Pages: 3
Assignors
LAI, CHIEN-JEN
Executed: 2017-04-24
ZHOU, XIN
Executed: 2017-04-24
PENG, DANPING
Executed: 2017-04-24
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO. 8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300-78, TAIWAN
Covered Property
(1)
Method of Modeling a Mask by Taking into Account of Mask Pattern Edge Interaction