Patent Assignment
Reel/Frame 042339/0231
Assignment of Assignor's Interest
Recorded: 2017-05-11
Pages: 4
Assignors
WU, CHUN-HSING
Executed: 2017-05-10
CHANG, HUNG-JUI
Executed: 2017-05-10
CHENG, CHIH-CHING
Executed: 2017-05-10
CHIU, YI-WEI
Executed: 2017-05-10
CHEN, KUN-CHENG
Executed: 2017-05-10
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO. 8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300-78, TAIWAN
Covered Property
(1)
Method for Controlling Exposure Region in Bevel Etching Process for Semiconductor Fabrication