Patent Assignment
Reel/Frame 042340/0172
Assignment of Assignor's Interest
Recorded: 2017-05-11
Pages: 3
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, AKASAKA BIZ TOWER, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Trim Method for Patterning During Various Stages of an Integration Scheme