Patent Assignment
Reel/Frame 042344/0800
Assignment of Assignor's Interest
Recorded: 2017-05-11
Pages: 3
Assignors
COLVIN, NEIL K.
Executed: 2017-05-11
HSIEH, TSEH-JEN
Executed: 2017-05-11
SILVERSTEIN, PAUL B.
Executed: 2017-05-11
Assignee
AXCELIS TECHNOLOGIES, INC.
108 CHERRY HILL DRIVE, BEVERLY, MASSACHUSETTS, 01915
Covered Property
(1)
Lanthanated Tungsten Ion Source and Beamline Components
Application:
15/592,857 →
Publication:
US 2017/0330725