Patent Assignment
Reel/Frame 042363/0880
Assignment of Assignor's Interest
Recorded: 2017-05-12
Pages: 4
Assignors
LUBOMIRSKY, DMITRY
Executed: 2015-01-27
NGUYEN, SON T.
Executed: 2015-01-27
NGUYEN, ANH N.
Executed: 2015-01-27
PALAGASHVILI, DAVID
Executed: 2015-01-28
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Plasma Processing System Workpiece Carrier with Thermally Isolated Heater Plate Blocks