Patent Assignment
Reel/Frame 042364/0678
Assignment of Assignor's Interest
Recorded: 2017-05-12
Pages: 3
Assignors
FISCHER, ANDREAS
Executed: 2017-04-13
LILL, THORSTEN
Executed: 2017-04-13
JANEK, RICHARD
Executed: 2017-04-13
BONIFACE, JOHN
Executed: 2017-05-10
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Atomic Layer Etching of AL203 Using a Combination of Plasma and Vapor Treatments